With the help of the X-Ray fluorescence method, more tasks
can be fulfilled than have been shown here so far. Another
example shall be demonstrated by the multi element profile
measuring system MPD 2000.
First, the sample to be examined is angle grinded. A
monochromatized X-ray beam strikes the sample in an
angle that is smaller than the total reflection angle.
This primary beam activates the fluorescence on the
surface. The fluorescence radiation is received by
an energy-dispersive detector for X-ray radiation.
As the sample is moved linearly, the whole of the etched
surface can be scanned.
When the etching angles are known, the sample position
can be recalculated into a depth coordinate. Therefore, the
elements can be distributed along the depth of the sample
after the analysis of the spectra is completed. By using a
suitable preparation technique such as ion-beam etching, a
depth resolution of only a few nm can be reached.